engleski

Study of optical emission from inductively coupled RF Oxygen Plasma

The study of optical emission in inductively coupled RF oxygen plasma has been performed at the pressure between 10 to 300 Pa. Plasma was generated with an RF generator at the frequency of 27.12 MHz and the output power of 300 W. Spectra were measured in the range from 200 nm to 1100 nm by means of a high-resolution optical spectrometer. At high pressure the main spectral features observed were atomic oxygen transitions at 777.2 nm and 844.8 nm, and molecular oxygen band at 762 nm. The atomic emission intensity showed a maximum at the pressure of about 75 Pa, while molecular band intensity increased monotonically as the total pressure increased. By decreasing oxygen pressure other atomic and molecular features appeared in spectra, such as H atomic lines, molecular OH band and O2+ band. The increase of atomic and molecular features follows different paths. The behavior of spectral intensity depending on total pressure is discussed in terms of different discharge modes.

optical emission spectroscopy; oxygen plasma

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