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Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating

The gradient index coatings and optical filters based on them are a challenge for fabrication. In a round-robin experiment basically the same hybrid antireflection coating for the visible spectral region has been deposited with three different techniques: electron beam evaporation, ion beam sputtering and radio frequency magnetron-sputtering. Spectral performances of such one-side and both-side coated samples have been compared with corresponding theoretical spectra of the designed profile. Also, reproducibility of each process is checked.

antireflection ; coatings ; deposition and fabrication ; gradient index ; hybrid coating ; mixture layers ; co-deposition ; co-sputtering.

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