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Discharge cleaning of porous ceramics (CROSBI ID 519262)

Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija

Vesel, Alenka ; Cvelbar, Uroš ; Mozetič, Miran ; Drenik, Aleksander ; Krstulović, Nikša ; Milošević, Slobodan Discharge cleaning of porous ceramics // MIDEM Conference 2006 Proceedings / Šorli, Iztok et al (ur.). Ljubljana: Society for Microelectronics, Electronic Components and Materials (MIDEM), 2006. str. 113-118-x

Podaci o odgovornosti

Vesel, Alenka ; Cvelbar, Uroš ; Mozetič, Miran ; Drenik, Aleksander ; Krstulović, Nikša ; Milošević, Slobodan

engleski

Discharge cleaning of porous ceramics

Experimental results of the discharge cleaning of porous sintered Al2TiO5 ceramics are presented. The ceramics soaked with a mineral oil was exposed to RF oxygen plasma at the pressure of 75 Pa. Plasma parameters were measured with a Langmuir probe, a catalytic probe and by optical emission spectroscopy. The plasma density was about 2 × 1016 m− 3, the electron temperature was about 6 eV and the density of neutral oxygen atoms was about 2 × 1021 m− 3. Optical emission spectra between 200 and 1, 000 nm were measured continuously during plasma treatment. The CO peak resulting from oil oxidation reached a well-pronounced maximum between 100 and 150 s of plasma treatment. The maximum in CO corresponded well with a minimum in O peaks. Concentration of oil in the samples was estimated by Energy Dispersion X-ray analysis (EDX). Initially the samples showed high concentration of carbon (about 38 at.%), while after plasma treatment the carbon concentration decreased below the detection limit of our EDX device. The cleaning efficiency was explained by diffusion of oil towards the surface where it was removed by oxidation with oxygen radicals.

Porous materials; discharge cleaning oxygen plasma; optical emission spectroscopy

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Podaci o prilogu

113-118-x.

2006.

objavljeno

Podaci o matičnoj publikaciji

MIDEM Conference 2006 Proceedings

Šorli, Iztok et al

Ljubljana: Society for Microelectronics, Electronic Components and Materials (MIDEM)

Podaci o skupu

42nd International Conference on microelectronics, devices and materials

predavanje

13.09.2006-15.09.2006

Strahinj, Slovenija

Povezanost rada

Fizika