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Pregled bibliografske jedinice broj: 256701

GISAXS study of Si nanocrystals formation in SiO2 thin films


Pivac, Branko; Kovačević, Ivana; Dubček, Pavo; Radić, Nikola; Bernstorff, Sigrid
GISAXS study of Si nanocrystals formation in SiO2 thin films // Thin Solid Films, 515 (2006), 2; 756-758 (međunarodna recenzija, članak, znanstveni)


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Naslov
GISAXS study of Si nanocrystals formation in SiO2 thin films

Autori
Pivac, Branko ; Kovačević, Ivana ; Dubček, Pavo ; Radić, Nikola ; Bernstorff, Sigrid

Izvornik
Thin Solid Films (0040-6090) 515 (2006), 2; 756-758

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Si nanostructures; SiO/SiO2 amorphous superlattice; small angle X-ray scattering

Sažetak
We present a study on amorphous SiO/SiO2 superlattice using grazing-incidence small-angle X-ray scattering (GISAXS). Amorphous SiO/SiO2 superlattices were prepared by high vacuum evaporation of 3 nm thin films of SiO and SiO2 (10 layers each) on Si(100) substrate. After the evaporation, samples were annealed at 1100  C for 1h in vacuum, yielding to Si nanocrystals formation. Using a Guinier approximation, the shape and the size of the crystals were obtained.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekt / tema
0098021
0098020

Ustanove
Institut "Ruđer Bošković", Zagreb

Profili:

Avatar Url Ivana Capan (autor)

Avatar Url Pavo Dubček (autor)

Avatar Url Branko Pivac (autor)

Avatar Url Nikola Radić (autor)

Citiraj ovu publikaciju

Pivac, Branko; Kovačević, Ivana; Dubček, Pavo; Radić, Nikola; Bernstorff, Sigrid
GISAXS study of Si nanocrystals formation in SiO2 thin films // Thin Solid Films, 515 (2006), 2; 756-758 (međunarodna recenzija, članak, znanstveni)
Pivac, B., Kovačević, I., Dubček, P., Radić, N. & Bernstorff, S. (2006) GISAXS study of Si nanocrystals formation in SiO2 thin films. Thin Solid Films, 515 (2), 756-758.
@article{article, year = {2006}, pages = {756-758}, keywords = {Si nanostructures, SiO/SiO2 amorphous superlattice, small angle X-ray scattering}, journal = {Thin Solid Films}, volume = {515}, number = {2}, issn = {0040-6090}, title = {GISAXS study of Si nanocrystals formation in SiO2 thin films}, keyword = {Si nanostructures, SiO/SiO2 amorphous superlattice, small angle X-ray scattering} }

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus





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