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Pregled bibliografske jedinice broj: 256559

The influence of post deposition plasma treatment on SnOx structural properties


Gracin, Davor; Juraić, Krunoslav; Gajović, Andreja; Dubček, Pavo; Djerdj, Igor; Tomašić, Nenad; Krajinović, Sanja; Milun, Milorad; Bernstorff, Sigrid
The influence of post deposition plasma treatment on SnOx structural properties // Vacuum, 82 (2007), 2; 266-269 doi:0.1016/j.vacuum.2007.07.042 (međunarodna recenzija, članak, znanstveni)


Naslov
The influence of post deposition plasma treatment on SnOx structural properties

Autori
Gracin, Davor ; Juraić, Krunoslav ; Gajović, Andreja ; Dubček, Pavo ; Djerdj, Igor ; Tomašić, Nenad ; Krajinović, Sanja ; Milun, Milorad ; Bernstorff, Sigrid

Izvornik
Vacuum (0042-207X) 82 (2007), 2; 266-269

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Tin-oxide; TCO; GISAXS; XRD; SEM; XPS

Sažetak
Thin SnOx films deposited by APCVD have been exposed to hydrogen plasma. Influence of hydrogen plasma on SnOx film properties was investigated by GISAXS, XRD, SEM, XPS and transmittance measurement in visible wavelength range. As deposited films were nano-crystalline, the average crystallite size was between 15 and 40 nm and preferred orientation was in [200] direction. By exposure to hydrogen plasma, the degree of preferential orientation was decreased, the average crystal size was lowered and the micro-strain increased. The hydrogen plasma etched away part of surface layer, possibly preferentially trough process of SnOx reduction. GISAXS results suggest that as deposited samples were built of nano-crystals in shape of non truncated pyramids. After plasma treatment, their shape was greatly distorted and the GISAXS signal becomes isotropic.

Izvorni jezik
Engleski

Znanstvena područja
Fizika

Napomena
Proceedings of the 11th Joint Vacuum Conference (JVC-11) Prague, Czech Republic 24-28 September 2006 ; edited by V. Matolín and K. Mašek



POVEZANOST RADA


Projekt / tema
035-0352828-2840 - Elektronska i kristalna struktura poduprtih samoorganiziranih nano-sistema (Petar Pervan, )
098-0982886-2894 - Tanki filmovi legura silicija na prijelazu iz amorfne u uređenu strukturu (Davor Gracin, )
098-0982886-2895 - Novi amorfni i nanostrukturirani tankoslojni materijali (Nikola Radić, )
098-0982904-2898 - Fizika i primjena nanostruktura i volumne tvari (Mile Ivanda, )
119-0982886-1009 - Struktura i svojstva posebnih nanomaterijala dobivenih suvremenim tehnikama (Antun Tonejc, )

Ustanove
Institut "Ruđer Bošković", Zagreb

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus


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