engleski

Carbon analysis and depth profiling using 12C(alpha, alpha)12C non-Rutherford elastic scattering

Non-Rutherford elastic scattering is often used to obtain concentrations of low Z elements in heavier matrices that are normally difficult or not possible at all to analyze if the cross sections are of pure Rutherford type. Sometimes strong and narrow resonances with high cross section enhancement are used but they require multiple measurements per one sample and complicated data analysis. In the present work we applied the fact that the non-Rutherford elastic scattering cross section for 12C(alpha, alpha) 12C between 3.5 and 4 MeV is almost constant and several times larger than Rutherford at backward angles. This enhancement was sufficient to determine in only one measurement the amount and depth profile of carbon in different samples such as: thin SiC, a-Si1-xCx:H films and SiO2 samples implanted with 320 keV carbon ions. In case of SiO2 implanted samples the method was enough sensitive to determine differences in carbon depth profiles before and after the sample annealing. The sensitivity and depth profiling ability of the method was discussed and compared with some other IBA techniques that can be used for carbon determination such as 12C(p, p) 12C elastic scattering or 12C(d, p) 13C nuclear reaction.

depth profiling; carbon analysis

nije evidentirano