engleski

Optical emission spectroscopy of laboratory plasmas using mini fiber spectrometers

Laboratory plasmas such as radio-frequency inductively coupled discharges or laser induced plasmas have a great potential in various technological and scientific applications [1, 2, 3]. There is a constant need for improvements of their characterisation in a real time during various processes of material treatments where a rapid change of the plasma content occurs. Optical emission spectroscopy is a traditionally very efficient tool which is becoming even more important with the appearance of a various miniature spectrometers. In the present study we have explored possibilities (capabilities) of various miniature fiber spectrometers for characterisation of plasma content. We present and discuss several aspects of miniature CCD spectrometers in plasma studies such as a spectral response, spectral resolution, time integration etc. [1] A. Vesel, M. Mozetič, A. Drenik, S. Milošević, N. Krstulović, M. Balat-Pichelin, I. Poberaj, D. Babić, Plasma Chemistry and Plasma Processing in press 2006. [2] . N. Glavan, N. Krstulović, N. Čutić, S. Milošević, U. Cvelbar, A. Vesel, A. Drenik, M. Mozetič, Vakuumist 25/4 (2005), 29-33. [3] N. Krstulović, I. Labazan ; S. Milošević, U. Cvelbar, A. Vesel, M. Mozetič Materiali in tehnologije. 38 51-54 (2004).

plasma; optical emission spectroscopy; miniature spectrometers

ISBN zbornika: 2-914771-35-5