engleski

LIGA Beamline at ELETTRA: Conceptual Design and Technical Specifications

In recent years the LIGA technique permitted to extend the application of microstructure production from fields relted to electronics to fields related to micromechanics and microoptics. In the LIGA technology deep X-ray lithography constitutes the most important fabrication step. The performance of this step was made possible by the availability of modern synchrotron radiation storage rings characterised by high resolution, high intensity, extreme parallelism, high degrees of collimation, high energy density and high spectral density at short wavelengths. This conceptual design constitutes a feasibility study for a bending magnet beamline dedicated to LIGA-based micromachining to be installed at the storage ring ELETTRA in Trieste, Italy. The document contains the technical specifications and the definition of the optical configuration of the LIGA beamline as well as the values of the main design parameters that represent a compromise between the users' requirements and the characteristics of the radiation source. The document contains also all the information necessary for the future work on the detailed design of the beamline.

LIGA technique; micromechanics; beamline design

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