engleski

Nanostructure as seen by the SAXS

Small Angle X-ray scattering (SAXS) has been successfully applied on size and shape investigation of nanometer size features in different fields. With the rise of interest in nanoparticles in material science, the method is fully employed in research of wide variety of materials. Finally, the advance of thin films research with the structural features in nanometer range also shows great need for SAXS, albeit in the grazing incidence set up (GISAXS). The sensitivity of GISAXS on the surface roughness is employed in the investigation of the quality of the film growth while the thickness and the density of the film are determined precisely. The size and shape of the nanostructures, be it particles or vacancies, precipitations or agglomerations, that are present in the film are easily obtained, as well as the information about their depth distribution. The presence of nanoparticles on the film surface, or on the interface between different films in form of islands is clearly resolved. An overview of several experiments is given, ranging from mainly surface sensitive X-ray reflectivity, through strong particle scattering of dense systems, to SAXS investigation of oriented non isotropic particle buried in film.

SAXS; GISAXS; thin film; quantum dots

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