Examples for application and diagnostics in plasma-powder interaction - art. no. 93. (CROSBI ID 113777)
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Kersten, Holger ; Wiese, Ruben ; Thieme, G. ; Frohlich, Maik ; Kopitov, A. ; Bojic, Diana ; Scholze, F. ; Neumann, H. ; Quaas, M. ; Wulff, H. ; Hippler, Rainer
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Examples for application and diagnostics in plasma-powder interaction - art. no. 93.
Low-pressure plasmas offer a unique possibility of confinement, control and fine tailoring of particle properties. Hence, dusty plasmas have grown into a vast field and newapplications of plasma-processed dust particles are emerging. There is demand for particles with special properties and for particle-seeded composite materials. For example, the stability of luminophore particles could be improved by coating with protective Al2O3 films which are deposited by a PECVD process using a metal-organic precursor gas. Alternatively, the interaction between plasma and injected micro-disperse powder particles can also be used as a diagnostic tool for the study of plasma surface processes. Two examples will be provided: the interaction of microsized (SiO2) grains confined in a radiofrequency plasma with an external ion beam as well as the effect of a dc-magnetron discharge on confined particles during deposition have been investigated.
Dust particles ; Energy influx ; Particulate ; Discharge ; Substrate ; Rotation ; Sheath ; Films
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