Diffusion and phase formation during annealing of Al/Cu/Fe thin films (CROSBI ID 501684)
Prilog sa skupa u zborniku | sažetak izlaganja sa skupa | međunarodna recenzija
Podaci o odgovornosti
Čekada, Miha ; Panjan, Peter ; Dolinšek, J. ; Medunić, Zvonko ; Jakšić, Milko ; Radić, Nikola
engleski
Diffusion and phase formation during annealing of Al/Cu/Fe thin films
The Al-Cu-Fe system is interesting due to the existence of the quasicrystalline phase Al62.5Cu25Fe12.5 as well as its approximant phases. One of possible ways to deposit such structures in thin film form is composed of two steps: to deposit a multilayer structure of individual elements and consequently anneal it in order to homogenize the film. Proper understanding of the diffusion patterns is essential. For this purpose several bilayers and trilayers of individual elements were deposited by sputtering with a total thickness of about 400 nm. Afterwards, the samples were annealed in tube furnace in inert atmosphere. Rutherford backscattering spetrometry (RBS) and Auger electron spectrometry (AES) were used to quantify the depth profiles. Individual phases were identified by X-ray diffraction (XRD). The results point out to a two-stage process as a function of rising temperature: first Al and Cu form a compound layer, later to incorporate iron as well. Various methods of concentration maesurement are also discussed (RBS, EDS, mass and thickness of layers).
Al/Cu/Fe thin films; phase formation
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Podaci o prilogu
208-208-x.
2004.
objavljeno
Podaci o matičnoj publikaciji
IVC-16 (16th Internationa Vacuum Congress), ICSS-12 (12 International Conference on Solid Surfaces) NANO-8 (8th Int. Conference on Nanometer Scale Science and Technology) AIV-17 (17th Vacuum INternational Symposium Book 1: Plenary and Parallel Sessions)
Sancrotti, Massimo
Venecija: IUVSTA & Associazione Italiana del Vuoto
Podaci o skupu
IVC-16 (16th INternationa Vacuum Congress), ICSS-12 (12 International Conference on Solid Surfaces) NANO-8 (8th Int. Conference on Nanometer Scale Science and Technology) AIV-17 (17th Vacuum INternational Symposium)
predavanje
28.06.2004-02.07.2004
Venecija, Italija