Polyslicon Temperature Sensor (CROSBI ID 467117)
Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Bendeković, Zdravko ; Biljanović, Petar ; Grgec, Dalibor
engleski
Polyslicon Temperature Sensor
Temperature dependence of polysilicon electrical resistance is investigated using existing polysilicon electrical conduction models. Conducted simulations showed the possibility of producing polysilicon resistors having a stable resistance on temperature dependence. A new polysilicon temperature sensor structure is proposed and processed according to optimal specifications. Measurements conducted on the processed samples showed that they have an almost linear resistance vs. temperature characteristic in a wide temperature range from 200 to 800 K.
polysilicon; temperature sensor; conduction model; electrical resistance; samples processing
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Podaci o prilogu
362-366-x.
1998.
objavljeno
Podaci o matičnoj publikaciji
Baal-Schem, Jacob
Tel Aviv: Institute of Electrical and Electronics Engineers (IEEE)
Podaci o skupu
MELECON ´98 - 9th Mediterranean Electrotechnical Conference
predavanje
18.05.1998-20.05.1998
Tel Aviv, Izrael