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Pregled bibliografske jedinice broj: 156573

Analysisi of the nano-structural properites of thin film Silicon-Carbon alloys


Gracin, Davor; Juraić, Krunoslav; Dubček, Pavo; Gajović, Andreja; Bernstorff, Sigrid
Analysisi of the nano-structural properites of thin film Silicon-Carbon alloys // Vacuum, 80 (2005), 1-3; 98-101 (međunarodna recenzija, članak, znanstveni)


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Naslov
Analysisi of the nano-structural properites of thin film Silicon-Carbon alloys

Autori
Gracin, Davor ; Juraić, Krunoslav ; Dubček, Pavo ; Gajović, Andreja ; Bernstorff, Sigrid

Izvornik
Vacuum (0042-207X) 80 (2005), 1-3; 98-101

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
amorphous silicon carbide; nano-structure; GISAXS; FTIR; Raman

Sažetak
Amorphous hydrogenated silicon-carbon thin films with high hydrogen content (20-40 at%) and carbon to silicon ratio between 0.2 and 0.4, were deposited by sputtering of silicon target in gas mixture containing hydrogen and carbon atoms. The samples were heated up to 10500C in order to form crystal-like structures. The structural ordering on atom level was estimated by FTIR (Fourier Transform Infrared) and Raman spectroscopy while the homogeneity on nano-scale was examined by GISAXS (Grazing Incidence Small Angle X-ray Scattering), performed on ELETTRA synchrotron radiation source, Trieste (Italy). Results of GISAXS spectra of all of measured specimens indicate presence of "particles" in the "bulk" of the films, with size distribution between 0.8 and 1.5 nm and mean values variation between 2.8 and 4.8 nm. By comparison with results of vibratonal spectroscopy, the "particles" in amorphous phase was identified as voids agglomerates while in annealed samples they are most probably nano-crystals of SiC.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Ustanove:
Institut "Ruđer Bošković", Zagreb

Profili:

Avatar Url Davor Gracin (autor)

Avatar Url Krunoslav Juraić (autor)

Avatar Url Pavo Dubček (autor)

Avatar Url Andreja Gajović (autor)

Citiraj ovu publikaciju

Gracin, Davor; Juraić, Krunoslav; Dubček, Pavo; Gajović, Andreja; Bernstorff, Sigrid
Analysisi of the nano-structural properites of thin film Silicon-Carbon alloys // Vacuum, 80 (2005), 1-3; 98-101 (međunarodna recenzija, članak, znanstveni)
Gracin, D., Juraić, K., Dubček, P., Gajović, A. & Bernstorff, S. (2005) Analysisi of the nano-structural properites of thin film Silicon-Carbon alloys. Vacuum, 80 (1-3), 98-101.
@article{article, year = {2005}, pages = {98-101}, keywords = {amorphous silicon carbide, nano-structure, GISAXS, FTIR, Raman}, journal = {Vacuum}, volume = {80}, number = {1-3}, issn = {0042-207X}, title = {Analysisi of the nano-structural properites of thin film Silicon-Carbon alloys}, keyword = {amorphous silicon carbide, nano-structure, GISAXS, FTIR, Raman} }
@article{article, year = {2005}, pages = {98-101}, keywords = {amorphous silicon carbide, nano-structure, GISAXS, FTIR, Raman}, journal = {Vacuum}, volume = {80}, number = {1-3}, issn = {0042-207X}, title = {Analysisi of the nano-structural properites of thin film Silicon-Carbon alloys}, keyword = {amorphous silicon carbide, nano-structure, GISAXS, FTIR, Raman} }

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus





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