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Depth resolution calculations for heavy-ion microbeam RBS analysis


Tadić, Tonči; Jakšić, Milko; Dujmić, Denis; Bogdanović, Ivančica
Depth resolution calculations for heavy-ion microbeam RBS analysis // Nuclear instruments & methods in physics research - section B : beam interactions with materials and atoms, 130 (1997), 1-4; 237-242 (međunarodna recenzija, članak, znanstveni)


Naslov
Depth resolution calculations for heavy-ion microbeam RBS analysis

Autori
Tadić, Tonči ; Jakšić, Milko ; Dujmić, Denis ; Bogdanović, Ivančica

Izvornik
Nuclear instruments & methods in physics research - section B : beam interactions with materials and atoms (0168-583X) 130 (1997), 1-4; 237-242

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Sažetak
A detailed study has been made on the use of MeV heavy ions (Z_1=6-8) for microbeam Rutherford backscattering (RBS) analysis, to improve the depth resolution of this technique. The algorithm for determination of the depth resolution was created and applied to the Zagreb microbeam facility. Theoretical estimates of depth resolution for C and O ion RBS analsis of thin oxide films and semiconductors, using annular silicon surface barrier detector (SSBD), are compared to those for proton backscattering analysis. Depth resolution in certain cases may be improved by increasing the heavy-ion energy. Therefore, by the proper choice of the heavy ion and the heavy-ion energy, the depth resolution may be improved, maintaining the efficiency of the RBS method.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Projekt / tema
00980206

Ustanove
Institut "Ruđer Bošković", Zagreb

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus