Pretražite po imenu i prezimenu autora, mentora, urednika, prevoditelja

Napredna pretraga

Pregled bibliografske jedinice broj: 140626

Mediun Range Ordering of Amorphous Silicon-Carbon Alloys Studied by GISAXS Spectroscopy and IBA


Gracin, Davor; Dubček, Pavo; Zorc, Hrvoje; Juraić, Krunoslav
Mediun Range Ordering of Amorphous Silicon-Carbon Alloys Studied by GISAXS Spectroscopy and IBA // Thin Solid Films, 459 (2004), 1-2; 216-219 (međunarodna recenzija, članak, znanstveni)


CROSBI ID: 140626 Za ispravke kontaktirajte CROSBI podršku putem web obrasca

Naslov
Mediun Range Ordering of Amorphous Silicon-Carbon Alloys Studied by GISAXS Spectroscopy and IBA

Autori
Gracin, Davor ; Dubček, Pavo ; Zorc, Hrvoje ; Juraić, Krunoslav

Izvornik
Thin Solid Films (0040-6090) 459 (2004), 1-2; 216-219

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
amorphous silicon carbide; nano-structure; GISAXS; IBA

Sažetak
The nano-structural properties of non-stoichiometric hydrogenated amorphous silicon carbide thin films, deposited by magnetron sputtering and PECVD (Plasma Enhanced Chemical Vapour Deposition) in a wide range of hydrogen and carbon concentration, were analysed by GISAXS (Grazing Incidence Small Angle X-ray Scattering), optical spectroscopy and IBA (Ion Beam Analysis). The GISAXS was performed on ELETTRA synchrotron radiation source, Trieste (Italy). All of the measured specimens showed the presence of "particles" with mean dimensions between 1.5 and 4.5 nm while the size distribution of "particles" varied from sample to sample between 1 and 2.5 nm. In order to determine the constitution of the "particles", the specimens were examined by vibrational spectroscopy (Raman and IR spectroscopy) when estimating the local structural and chemical ordering and IBA (Ion Beam Analysis) e.g. RBS (Rutherford Back Scattering) and ERDA (Elastic Recoil Detection Analysis) when estimating the composition of films. The results suggest that the "particles" are agglomerates of small voids, whose size increases with carbon to silicon ratio and whose distribution broadens with hydrogen concentration.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Ustanove:
Institut "Ruđer Bošković", Zagreb

Profili:

Avatar Url Davor Gracin (autor)

Avatar Url Krunoslav Juraić (autor)

Avatar Url Pavo Dubček (autor)

Avatar Url Hrvoje Zorc (autor)

Citiraj ovu publikaciju

Gracin, Davor; Dubček, Pavo; Zorc, Hrvoje; Juraić, Krunoslav
Mediun Range Ordering of Amorphous Silicon-Carbon Alloys Studied by GISAXS Spectroscopy and IBA // Thin Solid Films, 459 (2004), 1-2; 216-219 (međunarodna recenzija, članak, znanstveni)
Gracin, D., Dubček, P., Zorc, H. & Juraić, K. (2004) Mediun Range Ordering of Amorphous Silicon-Carbon Alloys Studied by GISAXS Spectroscopy and IBA. Thin Solid Films, 459 (1-2), 216-219.
@article{article, year = {2004}, pages = {216-219}, keywords = {amorphous silicon carbide, nano-structure, GISAXS, IBA}, journal = {Thin Solid Films}, volume = {459}, number = {1-2}, issn = {0040-6090}, title = {Mediun Range Ordering of Amorphous Silicon-Carbon Alloys Studied by GISAXS Spectroscopy and IBA}, keyword = {amorphous silicon carbide, nano-structure, GISAXS, IBA} }
@article{article, year = {2004}, pages = {216-219}, keywords = {amorphous silicon carbide, nano-structure, GISAXS, IBA}, journal = {Thin Solid Films}, volume = {459}, number = {1-2}, issn = {0040-6090}, title = {Mediun Range Ordering of Amorphous Silicon-Carbon Alloys Studied by GISAXS Spectroscopy and IBA}, keyword = {amorphous silicon carbide, nano-structure, GISAXS, IBA} }

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus


Uključenost u ostale bibliografske baze podataka:


  • The INSPEC Science Abstracts series





Contrast
Increase Font
Decrease Font
Dyslexic Font