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Sputter-deposited amorphous-like tungsten


Radić, Nikola; Tonejc, Antun; Ivkov, Jovica; Dubček, Pavo; Bernstorff, Sigrid; Medunić, Zvonko
Sputter-deposited amorphous-like tungsten // Surface and Coatings Technology, 180-181 C (2004), 66-70 (međunarodna recenzija, članak, znanstveni)


Naslov
Sputter-deposited amorphous-like tungsten

Autori
Radić, Nikola ; Tonejc, Antun ; Ivkov, Jovica ; Dubček, Pavo ; Bernstorff, Sigrid ; Medunić, Zvonko

Izvornik
Surface and Coatings Technology (0257-8972) 180-181 C (2004); 66-70

Vrsta, podvrsta i kategorija rada
Radovi u časopisima, članak, znanstveni

Ključne riječi
Magnetron sputtering; tungsten; amorphous phase

Sažetak
Thin tungsten films were prepared by sputtering of pure tungsten in a cylindrical magnetron device. The XRD-patterns of tungsten films deposited at 3.5 Pa argon pressure regularly exhibited only a very broad signal centered at 2q ť 40° - a distinctive mark of amorphous metals and alloys. The grain size of such amorphous-like tungsten material was estimated to be about 2 nm, while SAXS measurements yield radius of gyration of 1, 4 nm. Its thermal coefficient of the electric resistivity at room temperature was negative - a characteristic feature of amorphous metals and alloys. Thermal stability of the amorphous-like tungsten films was investigated by isochronal heating up to 720°C in vacuum, with continuous monitoring of electric resistivity. The obtained results indicate that amorphous-like tungsten is thermally stable up to 450°C.

Izvorni jezik
Engleski

Znanstvena područja
Fizika



POVEZANOST RADA


Ustanove
Institut za fiziku, Zagreb,
Institut "Ruđer Bošković", Zagreb,
Prirodoslovno-matematički fakultet, Zagreb

Časopis indeksira:


  • Current Contents Connect (CCC)
  • Web of Science Core Collection (WoSCC)
    • Science Citation Index Expanded (SCI-EXP)
    • SCI-EXP, SSCI i/ili A&HCI
  • Scopus