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Characteristics of Capillary Discharges as EUV Sources of Radiation in Range of 10...16 nm

The capillary discharge can be used as intense extreme ultraviolet (EUV) radiation source that produces a strong emission band at several wavelengths near 13.5 nm with FWHMs of about 1 nm and duration of approximately 100 ns. In particular this wavelength has attracted the attention by being a good candidate for the development of EUV lithography. The source described in this article is based on an ablative capillary discharge through a PVC (polyvinyl chloride) capillary. Remarkable bursts of radiation at the EUV wavelengths can be obtained this way at wavelengths of about 10, 13.5 and 16 nm. Due to its simplicity, such a device is a good candidate for a simple incoherent EUV source at 13.5 nm.

Ablative capillary discharge; EUV radiation sources; PVC capillary

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