engleski

The Influence of RF- power on Structure and Photocatalytic Properties of thin PEALD ZnO Films Deposited at Room Temperature

The photocatalytic activity of thin ZnO films deposited by plasma-enhanced atomic layer deposition at room temperature was investigated for different radio- frequency (RF) powers applied during synthesis. The films prepared with higher plasma power show higher photocatalytic activity. Structural and optical measurements were performed to determine the origin of their properties. All the films prepared were predominantly amorphous. However, the films prepared with higher plasma power show a more ordered structure.

ZnO ; thin films ; plasma- enhanced atomic layer deposition ; RF power ; photocatalysis

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