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Pregled bibliografske jedinice broj: 1220508

Broad compositional range and post treatment of DC magnetron sputtered AZO films


Mandić, Vilko; Panžić, Ivana; Bafti, Arijeta; Peretin, Ivan
Broad compositional range and post treatment of DC magnetron sputtered AZO films // EMRS fall meeting 2022 Book of Abstracts
Varšava, Poljska, 2022. str. 1-1 (pozvano predavanje, međunarodna recenzija, sažetak, znanstveni)


CROSBI ID: 1220508 Za ispravke kontaktirajte CROSBI podršku putem web obrasca

Naslov
Broad compositional range and post treatment of DC magnetron sputtered AZO films

Autori
Mandić, Vilko ; Panžić, Ivana ; Bafti, Arijeta ; Peretin, Ivan

Vrsta, podvrsta i kategorija rada
Sažeci sa skupova, sažetak, znanstveni

Izvornik
EMRS fall meeting 2022 Book of Abstracts / - , 2022, 1-1

Skup
EMRS Fall Meeting 2022

Mjesto i datum
Varšava, Poljska, 19-22.09.2022

Vrsta sudjelovanja
Pozvano predavanje

Vrsta recenzije
Međunarodna recenzija

Ključne riječi
TCO ; AZO thin-films ; magnetron sputtering ; solid state impedance spectroscopy ; AFM ; synchrotron GISAXS

Sažetak
Transparent conductive layers conduct electrical charge in efficient and stable manner while transmit light in the visible part of the spectrum. TCOs are broadly used in optoelectronics, particularly indium doped tin oxide (ITO), at a high production cost. Alternatively, zinc oxide (ZnO) n-type semiconductor can be Al doped (AZO) to improve its electrical properties. AZO films can be derived by various chemical and physical methods of deposition, for example by DC or RF magnetron sputtering commonly yielding uniform films with sufficient conductivity and transparency, with disadvantageous requirements for high vacuum and thermal post-processing MS grown AZO thin films greatly depend on the deposition parameters used during magnetron sputtering ; there is no consensus on how to prepare AZO films using MS. We investigated the films derived by DC MS (from two targets: ZnO and Al with individual power variation and subsequent thermal treatment) using various methods (GID, GISAXS, FEG-SEM, AFM, Raman, UV-VIS, contact angle, solid state impedance spectroscopy) It was shown, that for a deposition type, power and temperature play a crucial role on the resulting properties of prepared AZO films. We think that observed course of deposition and derivative parameters are the consequence of interplay of parameters, all of which are related with domain size. Each individual sample series can be described between extremes being: Al doped ZnO structure with inhomogeneous distribution of residual Al in the material at lower deposition powers and with more structurally disrupted ZnO with more homogeneous Al distribution facilitating better functionality.

Izvorni jezik
Engleski

Znanstvena područja
Kemija, Kemijsko inženjerstvo, Temeljne tehničke znanosti



POVEZANOST RADA


Projekti:
HRZZ-PZS-2019-02-1555 - Fotonaponska-geopolimerna fasada: uloga vode-kisika u naprednom sklapanju filmova kompozitnih materijala (PV-WALL) (Mandić, Vilko, HRZZ - 2019-02) ( POIROT)
HRZZ-UIP-2019-04-2367 - Fenomeni na površini tijekom priprave naprednih nanokompozita infiltracijom i funkcionalizacijom poroznih materijala (SLIPPERYSLOPE) (Mandić, Vilko, HRZZ - 2019-04) ( POIROT)
EK-EFRR-KK.01.2.1.02.0316 - Razvoj tehničkog rješenja za uštedu energije upotrebom VIS propusnih ili polupropusnih i IC-reflektivnih tankih slojeva (Mandić, Vilko, EK - KK.01.2.1.02) ( POIROT)

Ustanove:
Fakultet kemijskog inženjerstva i tehnologije, Zagreb

Profili:

Avatar Url Ivana Panžić (autor)

Avatar Url Arijeta Bafti (autor)

Avatar Url Vilko Mandić (autor)


Citiraj ovu publikaciju:

Mandić, Vilko; Panžić, Ivana; Bafti, Arijeta; Peretin, Ivan
Broad compositional range and post treatment of DC magnetron sputtered AZO films // EMRS fall meeting 2022 Book of Abstracts
Varšava, Poljska, 2022. str. 1-1 (pozvano predavanje, međunarodna recenzija, sažetak, znanstveni)
Mandić, V., Panžić, I., Bafti, A. & Peretin, I. (2022) Broad compositional range and post treatment of DC magnetron sputtered AZO films. U: EMRS fall meeting 2022 Book of Abstracts.
@article{article, author = {Mandi\'{c}, Vilko and Pan\v{z}i\'{c}, Ivana and Bafti, Arijeta and Peretin, Ivan}, year = {2022}, pages = {1-1}, keywords = {TCO, AZO thin-films, magnetron sputtering, solid state impedance spectroscopy, AFM, synchrotron GISAXS}, title = {Broad compositional range and post treatment of DC magnetron sputtered AZO films}, keyword = {TCO, AZO thin-films, magnetron sputtering, solid state impedance spectroscopy, AFM, synchrotron GISAXS}, publisherplace = {Var\v{s}ava, Poljska} }
@article{article, author = {Mandi\'{c}, Vilko and Pan\v{z}i\'{c}, Ivana and Bafti, Arijeta and Peretin, Ivan}, year = {2022}, pages = {1-1}, keywords = {TCO, AZO thin-films, magnetron sputtering, solid state impedance spectroscopy, AFM, synchrotron GISAXS}, title = {Broad compositional range and post treatment of DC magnetron sputtered AZO films}, keyword = {TCO, AZO thin-films, magnetron sputtering, solid state impedance spectroscopy, AFM, synchrotron GISAXS}, publisherplace = {Var\v{s}ava, Poljska} }




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