engleski

Influence of scan parameters on surface topography obtained via AFM

At the nano level, the surface condition is quantitatively described by areal topography parameters also known as 3D roughness parameters. In this paper, the measurement of areal topography parameters was conducted by using the atomic force microscope, tapping mode. The influence of scan parameters on the results of surface topography measurements, such as scan speed, scan size, and scan resolution, were analyzed using the design of experiments. In this paper, the values of scanning parameters for selected samples are discussed with the aim of establishing rules which will enable results measured on different atomic force microscopes to be comparable.

surface topography, atomic force microscope, scan parameters

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