engleski

Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films

Here, we report on a simultaneous growth and radical-initiated cross-linking of a hybrid thin film in a layer-by-layer manner via molecular layer deposition (MLD). The cross linked film exhibited a self-limiting MLD growth behavior and improved properties like 12% higher film density and enhanced stability compared to the non-cross-linked film.

Molecular layer deposition, SiAlCOH, hybrid thin films

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