engleski

Deposition of thin alumina films containing 3D ordered network of nanopores on different substrates

Self-supporting thin films containing nanopores are very promising materials to be used for multiple applications. Here we present a method for the production of nanomembranes containing a 3D ordered network of nanopores in an alumina matrix, with a diameter of about 1 nm, and body centered tetragonal structure of the network nodes [1]. The material is produced by magnetron sputtering deposition of a 3D ordered network of Ge nanowires in alumina matrix, followed by a specific annealing process resulting in the evaporation of Ge. We demonstrate that the films can be easily grown on different substrates, including porous ones. We believe that these films have a potential for applications in the fields of filtration, separation and sensing.

thin films ; magnetron ; sputtering deposition ; nanopores ; germanium nanowires

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