IBIC studies of oxygen doped polycrystalline silicon (CROSBI ID 489427)
Prilog sa skupa u zborniku | sažetak izlaganja sa skupa | međunarodna recenzija
Podaci o odgovornosti
Pivac, Branko ; Borjanović, Vesna ; Jakšić, Milko ; Pastuović, Željko ; Zulim, Ivan
engleski
IBIC studies of oxygen doped polycrystalline silicon
Ion beam induced charge (IBIC) collection technique can provide interesting and straightforward information about the semiconducting materials and different electronic device characteristics. This nuclear microprobe technique was used for the qualitative analysis of charge collection efficiency spatial distribution in several types of poly-Si material. We studied the influence of light impurities (oxygen, carbon) present in material on electrical activity of extended defects. It is shown that oxygen segregating close to structural defects influences their electrical activity, while for carbon we did not observe the same effect. We demonstrated that IBICC technique could be applied to provide spatial information about the position of electrically active defects, and/or their activation or deactivation during subsequent processing.
poly-Si; oxygen; defects; IBIC
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Podaci o prilogu
2003.
objavljeno
Podaci o matičnoj publikaciji
2nd aSiNet Workshop on Thin Silicon and 9th Euroregional Workshop on Thin Silicon Devices, Book of Abstracts
Shubert, Markus B. ; Conde, Joao P.
Lisabon: Instituto Superior Técnico
Podaci o skupu
2nd aSiNet Workshop on Thin Silicon and 9th Euroregional Workshop on Thin Silicon Devices
poster
19.02.2003-21.02.2003
Lisabon, Portugal