engleski

Friction compensation in ultrahigh-precision positioning

Ultrahigh-precision positioning devices are essential in precision engineering and microsystems’ technologies. As they need to allow sub-micrometric or even nanometric displacements, their nonlinear frictional behaviour, induced by a number of sliding and rolling components, has to be efficiently compensated for. If a model- based approach is followed, suitable modelling of such disturbances, which is generally performed using state-of the art friction models, has to be performed. An overview of different compensation and control algorithms applied to ultrahigh- precision positioning systems is hence given in this work.

friction compensation ; ultrahigh-precision ; precision engineering ; microsystem technologies ; control algorithms

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