engleski

Measurement of surface topography using an atomic force microscope

In this paper the analysis of influence quantities to the measurement of surface roughness using the atomic force microscope (AFM) was conducted. By measuring the surface of a sample with an atomic force microscope, the surface quality can be expressed quantitatively and qualitatively. Qualitative representation implies an image of the surface condition in 2D and 3D form, while surface roughness parameters quantitatively describe the surface of the sample. In this paper the influence of scan area, scan resolution, scan rate and the influence of the filtering of the primary surface on the results of roughness parameter measurements was performed on the selected samples.

atomic force microscope, filtering of the primary surface, surface topography, surface roughness

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