engleski

Test structures without metal contacts for DC measurement of 2D-materials deposited on silicon

A set of ring-shaped test structures is presented for electrical characterization of 2D as-deposited layers on Si that electrically interact with the substrate. The test method is illustrated by investigation of 3 different nm- thin layers that are expected to form an interfacial layer of negative fixed charge. A test procedure is described that gives a low turnaround time and non-destructive way of evaluating different deposition methods in terms of diode characteristics, interface conductance, and electron carrier injection into the deposited layer.

aluminum , atomic layer deposition , boron , chemical vapor deposition , electron injection , interface charge

nije evidentirano