Designing Micro-Mechanical Cantilever Resonator Arrays for Wideband Detection of Ultrasonic Xylem Cavitation Emissions Related to Plant Water-Stress (CROSBI ID 691577)
Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Oletic, Dinko ; Herth, Etienne ; Bouville, David ; Martincic, Emile ; Bilas, Vedran
engleski
Designing Micro-Mechanical Cantilever Resonator Arrays for Wideband Detection of Ultrasonic Xylem Cavitation Emissions Related to Plant Water-Stress
Precision agriculture lacks automated noninvasive, low-power methods of in-field monitoring of early symptoms of water-stress on individual plants. Water-stress causes the occurrence of cavitation bubbles in xylem vessels of woody plants, producing ultrasonic emissions detectable on the plant's trunk surface. We propose a MEMS design of a frequency-selective array of piezoelectric resonators, enabling low-power sorting of ultrasonic emissions by their frequency ranging from 100 to 500 kHz. Here we present an early design of such resonator array based on micro- cantilever beams with AlN thin-film piezoelectric electrodes. Finite element modeling was used to optimize beam geometries and piezoelectric electrode design, maximizing the piezoelectric voltage. A microfabrication technological process is proposed. Mechanical resonator arrays were prototyped on SOI wafers by front and back-side deep reactive ion etching (DRIE). Beam’s resonance modes were preliminarily measured by optical vibrometry.
water-stress ; cavitation ; ultrasonic emissions ; mechanical resonators ; cantilevers ; FEM
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Podaci o prilogu
41
2020.
objavljeno
Podaci o matičnoj publikaciji
Podaci o skupu
Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP 2020)
predavanje
15.06.2020-26.06.2020
Montpellier, Francuska