engleski

LFM Characterization of TiO2 Films on a Nanoindenter

Thin oxide films are commonly used as coatings in precision devices, where they are often subjected to sliding contacts and friction whose impact can be identified via experimental techniques. An original structured experimental procedure, based on advanced design-of-experiments (DoE) algorithms, allowing to determine the correlation between multiple process parameters and the resulting nanoscale friction, was recently proposed. Such an approach was applied to study, via nanoindentation measurements in the lateral force microscopy (LFM) mode, the effects of the most important influencing parameters on mesoscale friction. In fact, nanoindentation is a valid method to experimentally characterize friction forces in the uN range. LFM measurements performed on a nanoindenter are hence used in this work to assess the properties of a TiO2 thin-film deposited on an Si substrate. In the space defined by the experimentally determined ranges of sliding velocities and normal forces, the measurement points are determined via DoE routines. Experimental results allow thus establishing correlation functions that can be used as models of the mesoscale frictional behavior of TiO2 thin films.

friction ; thin oxide films ; nanoindentation ; LFM ; DoE ; meta-model

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